SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 03/29/2017

Revised (if Applicable):

Name of Task Force (TF): RF Measurements Task Force

Global Technical Committee: Metrics

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Defects introduced by process-critical original equipment manufacturer (OEM) components affect final wafer quality resulting in lower yields and higher manufacturing costs. While several SEMI RF Standards already provide solid foundation for RF products and systems, these Test Methods need to be updated to align with the latest industry requirements. Therefore, the RF Measurement Task Force is chartered to develop or revise existing Standards related to RF power delivery systems to align with the latest and future industry needs.
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2. Scope: (Define the specific activities that the TF will conduct.)

The RF Measurement Task Force will revise existing SEMI RF Standards, including, but not limited to:
· SEMI E113, Specification for Semiconductor Processing Equipment RF Power Delivery Systems
· SEMI E114, Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems
· SEMI E115, Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems
· SEMI E135, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment
· SEMI E136, Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
· SEMI E143, Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any Phase Angle

The RF Measurement Task Force will also develop new RF-related Standards aimed to address both current and future industry requirements
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
None
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4. Formation Date:(TF formed on)

Task Force formed on: 04/05/2017
Task Force approved by Committee/GCS on: 04/05/2017

5. Comments
None.