SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 02/24/2015Revised (if Applicable):

Document Number: 5834
SNARF for: Line Item Revision to SEMI M85-1014: Guide for the Measurement of Trace Metal Contamination on Silicon Wafer Surface by Inductively Coupled Plasma Mass Spectrometry

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: International Test Methods Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The New Standard: Guide for the Measurement of Trace Metal Contamination on Silicon Wafer Surface by Inductively Coupled Plasma Mass Spectrometry passed technical review at SEMICON West in July. There are, however, three technical items, which require either more precise description or additional information. We thus suggest more discussion in the TF and subsequently an appropriate line items revision of this Standard.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
There are three line items in the standard document, which need to be considered for revision. • § 10.1.7 and § 10.2.7: We consider the approach of "Otherwise, use the scanning solutions as the method blank solutions." not as appropriate. Instead, we suggest to either delete this sentence in both paragraphs or to choose the following approach for determining the Method Blank: 1. Expose the high-purity wafer to HF fume. 2. Scan the wafer a first time and dump the scanning solution. 3. Now with the wafer surface thus purified, repeat step 1, scan the wafer again, and use the resulting scanning solution albeit containing Si matrix and reflecting process impact. This should provide a sincere Method Blank.
• Note 4: There is definitely always an effect of the Si matrix on the plasma robustness, not only certain likelihood. Removal of Si matrix is possible by evaporation and reconstitution, however, the potential benefit is not worth the high effort. And the risk of contamination by such additional preparation steps is increased.
• § 12.3.1 and § 12.3.2: Here, a unique way is described for calculating detection limit and quantification limit, respectively. There are, however, alternative options to determine these two limits. We thus suggest to either use the wording "can be determined" or "One possibility to determine..." or to further discuss how to take into account those alternative options, which are common industry practice. Note 8 and Note 9 emphasize the importance of such discussion.


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 09/30/2014b. 1st Draft by: 04/30/2015
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/31/2015
e. TC Chapter Approval By:12/15/2015

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Silicon Wafer Committees in Europe, Japan, and North America.

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):
Silicon Wafer
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS02/24/2015
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on 04/19/2019
Extension Expires on04/18/2020