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SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5008
SNARF for: Revision to SEMI S12-0309, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination


Originating Global Technical Committee: EH&S
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: S12 Revision Task Force


1. Rationale: During the translation of the S12-0309 document into Japanese by SEMI and SEMI members, 10 minor comments were brought to the S12 Task Force’s attention for minor modifications to the existing document.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
From the 10 comments forwarded to the S12 Task Force for consideration at SEMICON West Task Force meeting on July 15, 2010 (0900 PST), two (2) comments were voted on by the S12 TF and found in the meeting to be Technical changes to the document. The other nine (9) minor miscellaneous comments were voted on by the S12 TF and found to be minor editorial changes to SEMI S12-0309.

The two “Technical” changes need to be placed on a line item ballot as early as Cycle 5. These line items are as follows:
1) Section 5.2.14, change the words “user” to “entity”. The SEMI translator stated that the user is not always th owner to a system or equipment.
2) Section 8.1.4, last sentence change the word “shall” to “should be”. The SEMI translator stated that this change should be made because this is a safety guideline.


b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/16/2010b. 1st Draft by: 07/30/2010
c. Preballot by: d. Technical Ballot by: 08/05/2010
e. Committee Approval By:04/15/2011

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 16, 2010