SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5375
SNARF for: Revisions to SEMI M80-1111, Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: International 450 mm Shipping Box

1. Rationale: The 450 mm FOSB standard was published as SEMI M80-1111.
Further activity was carried out to provide further clarification to the document on some interoperability features with other 450 mm carriers.
This addresses to align recently revised other carrier standards, as well as to correct some errors that were discovered.

Rate the Estimated Effect on the Industry
3: Major effect on a few companies - identify the relevant companies

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Line Item 1. Correction of items discovered in M80-1111

Line item 2. Modify shape of Carrier Frame Pin Hole to address tolerance conflicts between pin hole and load port pin diameters.

Line item 3. Center of Gravity Volume Text Description
Enhance the text description of the bounds of the COG volume to match the Figure.

Line item 4. Minor corrections
• Add missing text for Center Line of carrier door to the Reference Planes Specification section
• Correct Table 1 feature measurement locations to match figures
• Other corrections

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 12/08/2011b. 1st Draft by: 01/12/2012
c. Preballot by: d. Technical Ballot by: 02/03/2012
e. Committee Approval By:04/05/2012

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, there is no alternative to the use of patented technology or copyrighted item(s)
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: The letter of assurance was received for the current 450 FOSB standard.
Additional use of patented technology or copyrighted item(s) will not be required for the revision of the standard.

Approval: Activity approved by Committee/GCS on December 8, 2011