SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/31/2015Revised (if Applicable):

Document Number: 5876
SNARF for: New Standard: Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used In Corrosive Gas Systems by Use of a Ferric Chloride Solution

Originating Global Technical Committee: Gases
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Materials of Construction of Gas Delivery Systems Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

___________________________________________________________________________
1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Need – A simple test method for comparing corrosion resistance of stainless steels intended for fabrication of semiconductor gas supply components. The test method is a chemical procedure that does not require expensive analytical equipment.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

___________________________________________________________________________
2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This test method describes a procedure which may be used to rank the pitting corrosion resistance of wetted surfaces of tubing or components of finished surfaces intended for use in corrosive gas systems. Pitting corrosion is believed to be a major corrosion failure mode in semiconductor gas delivery systems, particularly in components and tubing welded and exposed to corrosive gases and moisture.
This test method is an adaptation of ASTM G48 Method E, Critical Pitting Temperature Test for Stainless Steel. The adaptation describes a method for performing the test method on coupons or wetted surface sections cut from gas supply system components or tubing. It is an aqueous immersion method in an acidified ferric chloride solution.
The test method is reproducible and provides a metric (critical pitting temperature) in addition to a qualitative (visual) evaluation of corrosion resistance.


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

___________________________________________________________________________
3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/01/2014b. 1st Draft by: 05/08/2015
c. (Optional) Informational Ballot by: d. Letter Ballot by: 05/22/2015
e. TC Chapter Approval By:07/14/2015

_____________________________________________________________________________
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Facilities Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
___________________________________________________________________________
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

___________________________________________________________________________
6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

___________________________________________________________________________
7. Comments, Special Circumstances:
Published as SEMI C92-0216.

__________________________________________________________________________
8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 4/8/2015
Member Review End Date: 4/23/2015

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
__________________________________________________________________________

9. SNARF Approval Dates:
TC Chapter or GCS04/27/2015
Recorded in TC Minutes

__________________________________________________________________________

10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on