SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 01/27/2016Revised (if Applicable):

Document Number: 5992
SNARF for: Revision to SEMI F41-0699, Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: High Purity Liquid Assemblies & Systems
Note: If a new task force is needed, also submit a task force organization form (TFOF)

___________________________________________________________________________
1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
This Guide is overdue for its mandatory five-year review (last reviewed 06-99) and needs to be brought up-to-date with the latest known technology.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

___________________________________________________________________________
2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. Remove performance criteria from the Purpose section.
2. Further define the distribution equipment and add extractables, cations, and impurities to the list of items available for testing in the criteria list of the Scope section.
3. Add a limitation removing systems having adverse reactions with water to the Limitations section.
4. Add SEMI C1, C27, C28, C30, C35, and F57 to the list of SEMI Standards in the Reference Standards and Documents section.
6. Insert total organic carbon (TOC) to the Abbreviations and Acronyms subsection and point of use (POU) in the definitions subsection of the Terminology section.
7. Divide Qualification Methodologies into two sections, Prechemical Qualification and Chemical Conditioning of the System; treat both of these as separate, full sections 7 and 8, respectively.
8. Add caveat to the Chemical Conditioning of the System section referring the reader to an initial review of the customer / site-specific qualification methodologies.
9. Collapse the general content of the Advantages of Conditioning the System and Conditioning with Same Chemical sections into one called Conditioning with Same Chemical section
10. In the Testing the Preconditioning Chemical Section, remove statements that the equipment manufacturer typically tests in preconditioned chemical before sending to the customer, as this is not necessarily a common occurrence in practice. Refer to SEMI F57 for a list of elements tested instead of identifying them individually.
11. In the Conditioning Procedure section, add hydrogen peroxide as a common chemical, include organic impurities in the list of items affected by the conditioning procedure, and insert statements as to the importance in considering the materials of construction in determining cleaning solutions to be used.
12. Add admonition to dispose of flush chemical in an environmentally responsible manner to section.
13. In section 8.3 of the revision, insert a note stating that the precleaning chemical may add impurities and so should be pretested prior to use.
14. In section 8.4 (Solvent Systems) of the current revision, add a low-moisture, inert gas recommendation if a purge is employed.
15. In section 9.1 (Adequacy of Sampling Points) of the current revision, add a statement guiding the user to sample from the farthest point of dispense if the dispense system is designed without a circulation return line.
16. In section 9.2 (Adequacy of Data), remove the duplicate or triplicate sample replication suggestion and state that an adequate sample quantity should be taken instead.
17. In section 9.1.4, cite SEMI C1 as a reference for choosing contamination-free sampling devices.
18. In sections 9.2.9 and 9.2.10 of the revision, split recommendations of particle sample number based on batch or continuous monitoring application.
19. Remove the Specialty Chemicals subsection from the Other Considerations section of the Guide

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:
F41-0699

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

___________________________________________________________________________
3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 01/01/2016b. 1st Draft by:
c. (Optional) Informational Ballot by: d. Letter Ballot by: 04/01/2016
e. TC Chapter Approval By:07/01/2016

_____________________________________________________________________________
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

___________________________________________________________________________
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

___________________________________________________________________________
6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

___________________________________________________________________________
7. Comments, Special Circumstances:
None.

__________________________________________________________________________
8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 1/27/2016
Member Review End Date: 2/10/2016

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
__________________________________________________________________________

9. SNARF Approval Dates:
TC Chapter or GCS02/17/2016
Recorded in TC Minutes

__________________________________________________________________________

10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on