Standards Doc. Bank

SEMI International Standards
Task Force Organization Form (TFOF)


Task Force Name: S2 Interlock and Safety Control Systems Reliability Selection


Global Technical Committee: EH&S
Originating Technical Committee Region: North America


1. Charter:

Prepare an RI about how the reliability of interlocks can be selected.

2. Scope:
Provide an overview of applicable standards and how to select the interlock. This because there is now a lot of change in the latest years that need to be addressed

3. Formal linkages with Task Forces in other Regions:
EU EHS TC

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4. Approval:
Task Force formed on: 07/16/2010