SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Revised (if Applicable):
Name of Task Force (TF):
S5 (FLD) Review Task Force
Global Technical Committee:
Originating Technical Committee Region:
(State the objective of the proposed TF.)
Oversee the mandatory 5-year review of SEMI S5, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases, including changes the TF deems appropriate to propose.
(Define the specific activities that the TF will conduct.)
Prepare ballot(s) with the changes, if any, the TF deems appropriate to propose.
Prepare ballot responses for adjudication by the NA EHS TCC.
3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Global Gases and Facilities Committees
4. Formation Date:
(TF formed on)
Task Force formed on:
Task Force approved by Committee/GCS on: