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SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5044
SNARF for: Revision to SEMI F32-0709 Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves


Originating Global Technical Committee: Gases
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: NA Gases Committee


1. Rationale: Revise Equation 1 because criteria per ISA S75.02 is “greater than or equal to” not “equal to”.

Revise Equation 2 given in SI units because the constant “0.0865” should be “133.65”.

Correct references to ISA S75.02 paragraphs that have changed because of new revision to S75.02.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Revise SEMI F32-0709 equation 1 from “equal to” to “greater than or equal to”.

Revise SEMI F32-0709 equation 2 constant from “0.0865” to “133.65”.

Revise references to ISA S75.02 paragraphs in F32 sections 8.2.2.1 from “5.1.3” to “6.1.3” and in section 9.2.3 from “7.3” to “8.3”.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/01/2010b. 1st Draft by: 08/01/2010
c. Preballot by: d. Technical Ballot by: 08/01/2010
e. Committee Approval By:11/01/2010

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 13, 2010