SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 06/01/2013Revised (if Applicable): 09/01/2015

Document Number: 5621
SNARF for: New Standard: Guide for Determining Ion Exchange Resin Contamination Contribution in High Purity Applications

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ultra Pure Water Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Advanced semiconductor manufacturing is becoming more and more susceptible to particulate and organic contamination. Ultrapure water (UPW) piping and piping components undergo rigorous cleanliness testing using the SEMI F57 standard. While ion exchange (IX) resin has a similar surface area to that of the piping material, it is not tested for its contribution to UPW contamination. Ion exchange resin used in UPW Polish loops represents similar sources of contamination as that of piping materials due to its location in the process. Fresh ion exchange resin is known to produce significant amounts of contamination when loaded in polishers. Different resin suppliers provide different methods of resin preparation. Therefore, absence of standardized testing and quality requirements pose risks of the usage of inadequate qualities of the resin. This Guide is needed urgently so a Preliminary Standard is planned to allow time for the Full-consensus Standard to be approved.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Advanced semiconductor factories with line widths of 45 nm and less.

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
IX resin and UPW quality.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/01/2013b. 1st Draft by: 07/14/2015
c. (Optional) Informational Ballot by: 08/01/2015d. Letter Ballot by: 09/01/2015
e. TC Chapter Approval By:10/01/2015

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
UPW ITRS Group, Yield Enhancement & Wafer environment and contamination control (WECC) (US and Europe, working with coordination with the SEMI group in Asia), SEMI Facilities Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s).

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
The timeline is expected to follow the General Milestones listed below:
1. Assemble team by July 1st 2013
2. Define boundaries for the guide (parameters, testing methods) - August 1st 2013
3. Develop testing methodology - September 1st 2013
4. Validation testing - November 1st 2013
5. Document ready for Preliminary Standard distribution - August 1st 2015

There are a limited number of IX resin suppliers for UPW applications. The success of this development will depend on effective participation of the resin suppliers, analytical service providers and end user input.


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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 08/03/2015
Member Review End Date: 08/17/2015

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS09/01/2015
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on