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SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 4986
SNARF for: Revision of SEMI M42-1000, Specification for Compound Semiconductor Epitaxial Wafers


Originating Global Technical Committee: Compound Semiconductor Materials
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: NA Compound Semiconductor Materials Committee


1. Rationale: SEMI M42 is due for 5-year review. The committee approved sending the document out for reapproval without change on the grounds that it is technically sound. However, the formatting etc. of the document will be updated to conform to current Regs and Style Manual, and references to ASTM F673 will be replaced with references to SEMI MF673.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Reapproval of SEMI M42.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 05/19/2010b. 1st Draft by: 07/01/2010
c. Preballot by: d. Technical Ballot by: 07/30/2010
e. Committee Approval By:06/01/2011

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on May 19, 2010