SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/15/2020Revised (if Applicable):

Document Number: 6688
SNARF for: New Standard - SPECIFICATION FOR 300mm TAPE FRAME FOUP LOAD PORT

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: 300mm Tape Frame PI&C Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Wafer retained on the tape frame (i.e. wafer tape frame) is placed in the open cassette defined in G77 and transferred at back end process line.
Cleanliness requirement becomes severe as process shrinks.
Standardization for mini-environment (FOUP) of which can contain wafer tape frames has been kicked off, and standard for 300mm Tape Frame FOUP Load port also need to develop in parallel.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: The back end process in Semiconductor industry

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The standard specifies 300mm Tape Frame FOUP Load Port defined by New SNARF No.xxxx (Title: Specification for 300mm Tape Frame FOUP).
- Process Equipment Interface
- AMHS interface
- Carrier ID exclusion zone and Location
- Load Port dimensions
- Info pad pin
- BOLTS (Box Opener/Loader to Tool Standard)
- Front Opening Interface between FOUP and Load Port
- Indicator


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 08/31/2018b. 1st Draft by: 09/15/2020
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/31/2020
e. TC Chapter Approval By:02/28/2021

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
3D Packaging & Integration GTC

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (see Procedure Manual 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
3D Packaging and Integration
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 09/15/2020
Member Review End Date: 09/28/2020

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS10/23/2020
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

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