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SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5062
SNARF for: Reapproval of SEMI E104-0303 - Specification for Integration and Guideline for Calibration of Low-Pressure Particle Monitor


Originating Global Technical Committee: Metrics
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: Integrated Measurement (EU) Task Force


1. Rationale: To reapprove E141-0705 - Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Reapproval of a Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/01/2010b. 1st Draft by:
c. Preballot by: d. Technical Ballot by: 08/01/2010
e. Committee Approval By:10/01/2010

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on August 5, 2010