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SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 4992
SNARF for: New Standard: Specific Device Model for Pressure Control Valves


Originating Global Technical Committee: Information & Control
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: SANPRO - (Sensor Actuator Network Communication Standard for PROFINET and PROFIBUS)


1. Rationale: The SAN E54 specification describes how different devices can communicate over an industrial communication network like DeviceNet, Profibus, Seriplex and so on.

The specification is divided in Common Device Models (used by all devices) and Specific Device Models (mass flow controllers, pumps). Today a lot of Specific Device Models are not defined.

To have a common definition and behavior of all devices it is necessary to define as much as possible Specific Device Models which are used in Semiconductor Equipment.

Today we are working on a “Profibus/Profinet SEMICONDUCTOR Devices Profile”.

To make this compliant to the E54 SAN spec, we need to extend the SAN specification about the missing SDM of these types of devices which we will support in our Profibus Profile (at the moment Vacuum Gauges, Mass Flow Controller, Pressure Control Valve, RF/DC Generators).

In a first step we submitted a SNARF for a Specific Device Model for Vacuum Pressure Gauges.

Now we want start working on the second Specific Device Model for Pressure Control Valves.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
SEMI SAN E54
New “Specific Device Model” to be implemented for Pressure Control Valves.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/01/2010b. 1st Draft by: 08/01/2010
c. Preballot by: d. Technical Ballot by: 08/30/2010
e. Committee Approval By:10/01/2010

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on June 9, 2010