SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5364
SNARF for: Revision to SEMI E162-1111: Mechanical Interface specification for 450mm Front-Opening Shipping Box Load Port

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: It is necessary for E162 to revise the following points, because FOSB standard(M80-1111) was published.
1) Note1 of section 4
2) Section 6.2

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:

It revises two places of next sentences.

1)Section 4
- Add the ”SEMI M80 - Mechanical Specification for Front-Opening Shipping Box Used to Transport and ship 450mm Wafers”.
- Delete the ”Note 1: the Global Silicorn Wafer Technical Comittee is developing a Mechanical Specification for Front-Opening Shipping Box intended to be in conjuction with this Document.”.

2)Section 6.2
- Replace the sentence from ”in the SEMI Standard for 450 FOSB ” to ”in SEMI M80”.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 12/07/2011b. 1st Draft by: 12/07/2011
c. Preballot by: d. Technical Ballot by: 01/03/2012
e. Committee Approval By:04/05/2012

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on December 9, 2011