Standards Doc. Bank

SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5026
SNARF for: Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components


Originating Global Technical Committee: Facilities
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: F1 Revision TF


1. Rationale: Task Force has been examining revision of SEMI F1-96. Task Force decided to revise current F1.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The task force will revise the SEMI F1-96 as follows;
1) Add a table title
2) Add floating-point arithmetic
3) Deletion of safety remarks
4) Addition of a Related Information section.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/18/2010b. 1st Draft by: 09/01/2010
c. Preballot by: d. Technical Ballot by: 10/04/2010
e. Committee Approval By:12/01/2010

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on December 6, 2011