SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/20/2021Revised (if Applicable):

Document Number: 6836
SNARF for: Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) and SEMI E90-0921, Specification for Substrate Tracking and E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: GEM 300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Currently, SEMI E87 does not support defining the contents/characteristics of a carrier in respect to the contents/characteristics of the substrate (e.g. die type, wafer thickness). Hence, mixed substrates inside a carrier cannot be distinguished by their contents/characteristics. Similarly, SEMI E90 does not support defining a substrate in respect to its contents/characteristics (e.g. die types, wafer thickness).

For some equipment like a bonder, this information is required for processing substrates where different substrates (e.g. different die types) are required. This is the case when a target substrate (on which dies are placed) require different dies types which are located on different source substrates (from which dies are picked). These source substrates are located inside a carrier. For these situations it is necessary to know which substrate can provide the required die type for the equipment to process.

This Line Item Revision should update SEMI E87 and SEMI E90 together because they are related. (SEMI E87 operations can instantiate SEMI E90 objects and access SEMI E90 object attributes).


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Some who implement SEMI E87 and SEMI E90

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
As part of the work on this Line Item Revision, the task force will investigate:


- Provide a way to identify additional characteristics of substrate. For example, consider making this an optional requirement. One potential way to address this is to add one or more new E90 substrate attributes.

- Provide a way to identify additional characteristics of substrate and carrier object (for example, what substrate type is in each slot, and they could be different). For example, consider making this an optional requirement. One potential way to address this is to define a new SEMI E87 carrier attribute that specifies this information for each substrate in the carrier slot (similar to the ContentMap attribute). This could be passed on when corresponding SEMI E90 objects are created (for example, as part of a Proceed With Carrier operation)

- Any other changes to address features or defects, or issues with the Style Guide raised by Task Force members during the development and review of the proposed changes related to these line item topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations.

- SEMI E87.1 will be updated to synchronize with changes in the primary standard (SEMI E87)

- SEMI E90.1 will be updated to synchronize with changes in the primary standard (SEMI E90)


Note - Some use cases or examples may be developed that would be appropriate in a Related Information or Appendix.

b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/01/2021b. 1st Draft by: 08/01/2021
c. (Optional) Informational Ballot by: d. Letter Ballot by: 09/01/2021
e. TC Chapter Approval By:01/01/2022

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
I&C Global Technical Committee
Korea GEM300 Task Force
Japan GEM300 Task Force
North America ABFI Task Force

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/23/2021
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on