SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 05/05/2023Revised (if Applicable):

Document Number: 7055
SNARF for: New Standard: Guide for Tube PECVD Graphite Boat Materials for Solar Cell Production

Originating Global Technical Committee: Photovoltaic
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: PV Equipment Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
PECVD equipment is one of the key process equipment in the photovoltaic industry, and graphite boat is the key process vehicle of PECVD, which affects the use performance and process performance of its equipment. As a technology developed for many years, graphite boat has not appeared in relevant standards and specifications for many years to provide effective reference documents for its graphite boat materials. The photovoltaic industry urgently needs to make a constructive document on PECVD stone boats, and is committed to improving production, reducing costs and upgrading products to meet the process requirements of the photovoltaic field for PECVD equipment.
The technical guide for graphite boat materials is necessary for production, scientific research and use. The document can provide guidance for the material selection and performance requirements of graphite boat, improve the design, manufacturing and operation, so as to reduce the ineffective resources invested in each link, and achieve the goal of better efficiency and cost reduction in the industry. This guide will provide guidance for users who participate in the development and design of graphite boats, as well as manufacturers who use graphite boats. The formulation of this guide is conducive to promoting the development and progress of deposition equipment technology in the photovoltaic industry.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Cell, PV

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This guide is mainly used for graphite boats materials in the photovoltaic industry. The content of this document mainly includes the material grade classification, material marking specification, defect definition and classification, appearance classification, thermal properties, mechanical properties, electrical properties and chemical properties of graphite boats, which has a reference value for companies manufacturing graphite boats and using graphite boats.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/13/2023b. 1st Draft by: 08/30/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/30/2024
e. TC Chapter Approval By:04/30/2025

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Photovoltaic (PV) - Materials
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 2023/3/24
Member Review End Date: 2023/4/12

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS04/13/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on