SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/01/2017Revised (if Applicable):

Document Number: 6316
SNARF for: Revision of SEMI C79-0113, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

Originating Global Technical Committee: Liquid Chemicals
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Ultra Pure Water Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

SEMI C79 is up for 5-year review. The timing of this revision coincides with growing concern of the industry ability to provide particles control due to limitations of existing particle metrology. Per UPW IRDS, there is a need for 7nm particles control. All known to the Ultra Pure Water Task Force filters commercially available do not provide complete particles removal of the 7 nm particles. Furthermore, there is a concern that filters may generate (shed) particles of that size.
Although currently published document provides adequate testing methodology, there is a need in additional improvements to help to address particles control of 5-7nm size, as well as addressing the concern of the particle shedding and other contamination leaching that was not effectively addressed by the previous revision.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Advanced semiconductor factories with line widths of 32 nm and less

c. Estimate technical difficulty of the activity.
III: Difficult - Limited expertise and resources exist and/or achieving consensus is difficult

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

- Filter performance validation, including particle shedding and other contamination leaching;
- Removal efficiency of the particles at the range of 5-15 nanometers;
- Considering to add to the scope if this revision effort the application of filters used in high purity liquid chemicals.


b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 02/07/2018b. 1st Draft by:
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/01/2018
e. TC Chapter Approval By:11/04/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)

The Liquid Filter Task Force under the Japan Liquid Chemicals Committee.


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:

The Liquid Filter Task Force under the Japan Liquid Chemicals Committee has developed an alternative document using gold particles for the challenge test vs. silica as used in this document.


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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 12/07/2017
Member Review End Date: 12/22/2017.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS01/04/2018
Recorded in TC Minutes11/07/2017

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

Section #9 GCS approval filed to be updated -> GCS distribution to take place from 12/22/2017-12/29/2017