Standards Doc. Bank

SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5050
SNARF for: Revision to SEMI E140-0305, Guide to Calculate Cost Of Ownership (COO) Metrics for Gas Delivery Systems


Originating Global Technical Committee: Metrics
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Equipment Cost of Ownership TF


1. Rationale: SEMI E140-0305 is due for its mandatory 5-year review.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The entire SEMI E140-0305 and its illustrative example Excel spreadsheet Supplemental File (published separately on the SEMI Standards Web site) need to be reviewed and updated as needed, especially to be compliant with the planned new revision to referenced SEMI E10 and any other relevant standards that may have been published since this revision. One example revision known is to correct the term “consumable” to “consumable part”. Any changes necessary to bring E140 into compliance with the SEMI Standards Style Manual will also be included.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/14/2010b. 1st Draft by: 10/01/2010
c. Preballot by: d. Technical Ballot by: 10/01/2010
e. Committee Approval By:03/01/2011

b: Activity Specific Milestones
a. Proof of Concept b. Acquisition of Resources:
c. Safety Checklist Completed



Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 14, 2010