SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: Revised (if Applicable):

Document Number: 7103
SNARF for:
Line Item Revision to SEMI E187(0122)- Specification for Cybersecurity of Fab Equipment


Originating Global Technical Committee: Information & Control
Originating TC Chapter: Taiwan
Task Force (TF) in which work is to be carried out: Fab & Equipment Information Security Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

___________________________________________________________________________
1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The SEMI E187 Specification for Cybersecurity of Fab Equipment has been released as the first cybersecurity standard for Fab equipment. The requirements outlined in SEMI E187 are considered the general foundation of Fab equipment security, but the implementation details remain flexible and subject to negotiation between suppliers and users. The purpose of this SNARF is to establish a common ground for compliance with SEMI E187 by adding a checklist for its requirements. By using this checklist, suppliers can conduct self-evaluation beforehand and streamline their compliance efforts for SEMI E187.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Semiconductor

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

___________________________________________________________________________
2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The line item revision will develop a table of check list to explain the implementation details for all the requirements in SEMI E187. And attached to SEMI E187 as a reference tool for implementing the requirements.


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

___________________________________________________________________________
3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 05/05/2023b. 1st Draft by: 08/01/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 12/01/2023
e. TC Chapter Approval By:01/01/2024

_____________________________________________________________________________
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

___________________________________________________________________________
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

___________________________________________________________________________
6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

___________________________________________________________________________
7. Comments, Special Circumstances:
None.

__________________________________________________________________________
8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 04/21/2023.
Member Review End Date: 05/03/2023.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
__________________________________________________________________________

9. SNARF Approval Dates:
TC Chapter or GCS05/05/2023
Recorded in TC Minutes

__________________________________________________________________________

10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on