SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/01/2017Revised (if Applicable):

Document Number: 6335
SNARF for: Line-Item Revision to SEMI E134: Specification for Data Collection Management


Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Diagnostic Data Acquisition Task Force NA
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

1) Preventing a very large size of report from being created
In E134, the DCP buffering interval is defined as minute, which limits the minimum DCP buffering time to one minute. As the amount of data that equipment can generate for the minimum buffer interval can become very large, it is necessary to devise a way so that client can do more fine control the size of the report to be generated on equipment.

2) Querying currently set exceptions on the equipment
It is not defined in E134 interfaces for client to query the currently set exceptions on equipment, so when an exception is set or cleared, only the exception state change information can be reported. However, there are cases where client needs to know all the exceptions currently set on the equipment. Even if client try to keep track state changes of all exceptions sent by the equipment, it not possible to track them correctly when the client establishes EDA connection after some time the equipment started its operation. A new client interface to query the currently set alarms is necessary.

3) Notification of DCP activation and deactivation
E134 defines a consumer interface to receive a DCP deactivation notification, but this DCP deactivation notification is limited to cases where the equipment faces performance degradation or hibernation, and moreover, there is no consumer interface to get notification when a DCP is activated. As the current EDA standard allows client and consumer to run on physically separate systems, there may be issues when consumer need to take measures when a DCP is activated or deactivated unless the client informs the consumer of the activation / deactivation information. So in the case, client may need to be notified whenever a DCP is activated or deactivated



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone implementing EDA

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

This proposal suggests to update E134 as follows:
1) Change the DCP buffer interval time unit from minute to second. Change the buffer interval property name from ‘intervalInMinutes’ to ‘intervalInSeconds’, and allow the buffer interval time to have value less than 1 second.

2) Add a new interface GetCurrentSetExceptionIds to DataCollectionManager Interface that can list all the exception Ids that are currently set in the equipment.

3) Add a new interface DCPActivation to DCPConsumer Interface that can notify whenever DCP is activated, and change the DCPDeactivation notification point so that every DCP deactivation can be notified to client.


The ballot will also include any minor changes identified during the ballot creation.


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/08/2017b. 1st Draft by: 01/31/2018
c. (Optional) Informational Ballot by: d. Letter Ballot by: 02/07/2018
e. TC Chapter Approval By:11/08/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s).

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
Letter of Intent not received

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is previously known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
IP Considerations section note:
NON-ASSERTION AGREEMENT between SEMI and Asyst Technologies has been signed with for US Patents #11/340101, #11/107508, #09/899833, and 09/496009, in 2008.


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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/08/2017
Recorded in TC Minutes11/08/2017

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on