SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4719
SNARF for: Revision to MS03-07, Terminology for MEMS Technology with title change to: Terminology for MEMS / NEMS Technology

Originating Global Technical Committee: MEMS / NEMS
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Terminology

1. Rationale:
Revise the existing MS0307, Terminology for MEMS Technology standard to incorporate current MEMS- and NEMS-related terms.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:

This document will only cover MEMS- and NEMS-related terminology.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/01/2008b. 1st Draft by: 04/13/2009
c. Preballot by: 04/13/2009d. Technical Ballot by: 05/18/2009
e. Committee Approval By:07/13/2009

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: SNARF revised on November 8, 2010 to include "NEMS" in the title.

Approval: Activity approved by Committee/GCS on October 13, 2008