SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 09/03/2015

Revised (if Applicable):

Name of Task Force (TF): Equipment Information Integration Task Force

Global Technical Committee: Information & Control

Originating Technical Committee Region: Taiwan

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1. Charter: (State the objective of the proposed TF.)
To develop the equipment automation standard suite and related standards for IC manufacturing to efficiently integrate any equipment information with MES(Manufacturing Execution System) and with secure protection to enable advanced automation process and new technology development.
1) Collect Taiwan IC makers’ requirement to apply or revise the SEMI equipment automation software standards.
2) Collaborate with the other region’s taskforces for new standard/requirement definition and promotion
3) Co-work with tool supplier to implement new 300mm standards.
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2. Scope: (Define the specific activities that the TF will conduct.)
The focus of the Equipment Information Integration Task Force is to refine the equipment automation interface standard suite to fulfill the requirement of new including
1. Equipment information collection (Interface-A, Sensor data, equipment log… etc.)
2. Equipment security enhancement and information protection
3. Equipment productivity monitoring and integrating with MES system
4. Equipment precise control

Teleconferences will be held as necessary and face-to-face meetings will be held at the three annual Taiwan standards meetings.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
EISS TF and DDA TF
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4. Formation Date:(TF formed on)

Task Force formed on: 09/03/2015
Task Force approved by Committee/GCS on: 09/03/2015

5. Comments
None.