SEMI International Standards
Task Force Organization Form (TFOF)

Task Force Name: Equipment Cleanness Task Force

Global Technical Committee: Facilities
Originating Technical Committee Region: Korea

1. Charter:

Clean Technology is critical to the semiconductor production line. If a semiconductor production line does not operate in ultra-clean levels, foreign material introduced during the process may prevent production of semiconductor device. The objective of this TF is to maintain the cleanness level inside of process and manufacturing equipments.

2. Scope:
The TF intends to provide various activities for cleanness levels.

3. Formal linkages with Task Forces in other Regions:
No linkages reported

4. Approval:
Task Force formed on: 07/14/2009