SEMI International Standards
Date Prepared: 11/25/2011Revised (if Applicable):

Name of Task Force (TF): Equipment Information System Security (EISS) Task Force

Global Technical Committee: Information & Control
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
This task force will develop and propose standards that define concept and required capabilities to maintain security of information system on semiconductor manufacturing equipment.
2. Scope: (Define the specific activities that the TF will conduct.)
Develop standards for controllers of semiconductor manufacturing equipment such as process equipment, metrology equipment, material transfer equipment and so on. The controller is;
implemented computer system connected to network.
can be accessed by operator through the user interface

The standard will define;
Common perception of security problems induced by malware or illegal access.
Concept for protection of those security problems.
Guide for required capabilities for the protection.

The task force is intended not to discuss IT but to discuss Applications and Conventions of existing IT to our business – Semiconductor Manufacturing Equipment.

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Europe: Equipment Automation Committee
Korea: Information & Control Committee
Taiwan: Information & Control Committee
North America: Information & Control Committee

4. Formation Date:(TF formed on)

Task Force formed on: 12/09/2011
Task Force approved by Committee/GCS on: 12/09/2011