SEMI International Standards
Task Force Organization Form (TFOF)

Task Force Name: Equipment Information System Security (EISS) Task Force

Global Technical Committee: Information & Control
Originating Technical Committee Region: Japan

1. Charter:

This task force will develop and propose standards that define concept and required capabilities to maintain security of information system on semiconductor manufacturing equipment.

2. Scope:
Develop standards for controllers of semiconductor manufacturing equipment such as process equipment, metrology equipment, material transfer equipment and so on. The controller is;
implemented computer system connected to network.
can be accessed by operator through the user interface

The standard will define;
Common perception of security problems induced by malware or illegal access.
Concept for protection of those security problems.
Guide for required capabilities for the protection.

The task force is intended not to discuss IT but to discuss Applications and Conventions of existing IT to our business – Semiconductor Manufacturing Equipment.

3. Formal linkages with Task Forces in other Regions:
Europe: Equipment Automation Committee
Korea: Information & Control Committee
Taiwan: Information & Control Committee
North America: Information & Control Committee

4. Approval:
Task Force formed on: 12/09/2011