SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5252
SNARF for: Revision of SEMI M57, Guide for Specifying Silicon Annealed Wafers with Title Change from Guide to Specification

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International Annealed Wafers Task Force

1. Rationale: SEMI M57 needs to be extended to finer geometries, such as to 65nm, 45nm, 32nm, and may be to 22nm.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The discussion on the technology changes to the document will take place at the Oct 2011 meeting and ballot will be prepared at the subsequent meetings.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/13/2011b. 1st Draft by: 08/01/2011
c. Preballot by: d. Technical Ballot by: 12/01/2011
e. Committee Approval By:03/01/2012

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 13, 2011