SEMI International Standards
Date Prepared: 03/04/2010Revised (if Applicable):

Name of Task Force (TF): F63 Revision Task Force

Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: North America

1. Charter: (State the objective of the proposed TF.)
The ultimate goal is providing updated UPW quality reference specification for design of UPW facility system that will support the factory needs in a cost effective way.
2. Scope: (Define the specific activities that the TF will conduct.)
The scope of the task force is updating existing F063 specification for UPW to the level of the water quality requirements that would support the needs of the advance Semiconductor manufacturing processes. The scope would cover the size of the node of 65nm and smaller.
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
The Task Force includes representatives from different regions and continents. The intent is to effectively engage UPW ITRS members in the development of the specification that will address both regional and cross-industry representation needs.
4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on: