SEMI International Standards
Task Force Organization Form (TFOF)
Task Force Name: F63 Revision Task Force
|Global Technical Committee: Liquid Chemicals|
|Originating Technical Committee Region: North America|
The ultimate goal is providing updated UPW quality reference specification for design of UPW facility system that will support the factory needs in a cost effective way.
The scope of the task force is updating existing F063 specification for UPW to the level of the water quality requirements that would support the needs of the advance Semiconductor manufacturing processes. The scope would cover the size of the node of 65nm and smaller.
3. Formal linkages with Task Forces in other Regions:
The Task Force includes representatives from different regions and continents. The intent is to effectively engage UPW ITRS members in the development of the specification that will address both regional and cross-industry representation needs.
Task Force formed on:
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