SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4760
SNARF for: Mechanical Specification for 450 mm Shipping Box Used to Transport and Ship 450 mm Wafers

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: International 450 mm Shipping Box

1. Rationale: 450 mm wafers are expected to be used for the next generation Fab.
Standardization activity has been started for 450 mm in-fab carriers, Loadport and others.
Develop and deliver 450mm Shipping Box Standards is requested

Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
III: Difficult - Limited expertise and resources exist and/or achieving consensus difficult

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Mechanical dimension and interface of 450mm Shipping Box without sacrificing wafer quality and protection during transportation and long keeping in storage
- Standardization items are Similar to M31 for horizontal FOSB
- Interoperability with 450 FOUP & 450 Loadport would be maintained in several features, however, the envelope of HFOSB, door thickness and door closing force would be specified for shipping box usage.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 05/13/2009b. 1st Draft by: 06/17/2009
c. Preballot by: 07/13/2009d. Technical Ballot by: 10/05/2009
e. Committee Approval By:12/04/2009

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: Need confirmation from SEMI regarding possible use of ISTA reference documents

Approval: Activity approved by Committee/GCS on June 18, 2009