SEMI International Standards
Task Force Organization Form (TFOF)
Task Force Name: Equipment Cost of Ownership TF
|Global Technical Committee: Metrics|
|Originating Technical Committee Region: North America|
Review and update equipment cost of ownership documents
Review of current cost of ownership documents E35 and E35.1 – including the manditory 5 year review of E35.1.
Extend to metrology and inspection equipment types.
3. Formal linkages with Task Forces in other Regions:
International COO Model for Wafer Metrology Equipment TF, Silicon Wafer Committee
Task Force formed on: 10/16/2002
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