TFOF for Equipment Cost of Ownership Task Force
SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
10/16/2002
Revised (if Applicable):
Name of Task Force (TF):
Equipment Cost of Ownership Task Force
Global Technical Committee:
Metrics
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
Review and update equipment cost of ownership documents
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2. Scope:
(Define the specific activities that the TF will conduct.)
Review of current cost of ownership documents E35 and E35.1 – including the manditory 5 year review of E35.1.
Extend to metrology and inspection equipment types.
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
International COO Model for Wafer Metrology Equipment TF, Silicon Wafer Committee
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4. Formation Date:
(TF formed on)
Task Force formed on:
10/16/2002
Task Force approved by Committee/GCS on:
5. Comments
None.