TFOF - Equipment Cost of Ownership TF


SEMI International Standards
Task Force Organization Form (TFOF)


Task Force Name: Equipment Cost of Ownership TF


Global Technical Committee: Metrics
Originating Technical Committee Region: North America


1. Charter:

Review and update equipment cost of ownership documents

2. Scope:
Review of current cost of ownership documents E35 and E35.1 – including the manditory 5 year review of E35.1.

Extend to metrology and inspection equipment types.


3. Formal linkages with Task Forces in other Regions:
International COO Model for Wafer Metrology Equipment TF, Silicon Wafer Committee

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4. Approval:
Task Force formed on: 10/16/2002