SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4812
SNARF for: New Standard:Guide for Flatness Measurement on 450 mm Wafers

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: International Advanced Wafer Geometry Task Force

1. Rationale: The characterization of 450mm wafers is one prerequisite for developing these wafers and for qualification of the material for IC processes. One of the most challanging requirements to the new material is the wafer flatness therefore the industry needs and has to agree as soon as possible how flatness has to be measured on 450mm. Within the Advanced wafer geometry taskforce a guide for flatness measurement of 450mm wafers is planned to be developed. Changing from 300mm to 450 mm wafer may result in a methodology which differs significantely from that for 300mm .
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
450mm wafer development, specification of 450mm wafers

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/09/2009b. 1st Draft by: 12/09/2009
c. Preballot by: d. Technical Ballot by: 03/10/2009
e. Committee Approval By:07/10/2009

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on October 7, 2009