SEMI International Standards
Standards New Activity Report Form (SNARF)
Revised (if Applicable):
PV-EIS Equipment Interface Specification Standards
Originating Global Technical Committee:
Originating TC Chapter:
Task Force (TF) in which work is to be carried out:
Photovoltaic – Equipment Interface Specification (PV-EIS)
Note: If a new task force is needed, also submit a task force organization form (TFOF)
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
IT Equipment integration as basis of all high functionality shopfloor IT Systems
On today’s advanced photovoltaic shopfloors transition from line-integrated IT solution based on PLCs and industry PC to fully-featured MES solution is a must for every company to keep its competitive advantage. High volume production supported by high automation capability is only possible by establishing Industry usable standards in all IT areas..
Cost cutting and efficiency reasons bring in multiple equipments from different vendors which must interoperate in various conditions. This can only be established by adequate standards adapted to the needs of PV manufacturing. Standardization, especially for semiconductor manufacturing, has enabled a tight integration of equipments and control systems which supported the increase in productivity over the last decades.
With the building of more and more new PV factories the need for standardization is becoming urgent. Equipment Integration standards for PV provide the ability to reduce integration costs of these new factories dramatically.
Equipment integration is expensive, time consuming, and risky
Equipment integration has become one of the major cost drivers, both in initial implementation (ramp up) and maintenance phase. Photovoltaic manufacturer and prime contractors are spending a huge amount of money and time to enable access to process and product data as well as to manage the equipments itself. Equipment suppliers also spent a lot of effort in providing specific interfaces to their different customers instead of concentrating their resources on enhancing manufacturing processes. PV manufacturers, their prime contractors as well as equipment suppliers needs to be given tools and
standards to concentrate on applications and on modeling equipment behavior instead of implementing “low-level communication”.
Low level communication is not the only important topic of equipment integration, it is the basis for all areas e.g. job control, material tracking, etc.
To facilitate equipment integration, an abstracted object model of the equipment is required, reflecting the requirements of PV manufacturers. This encompasses a decomposition of the equipment behavior into services and a defined list of variants (sub services). “Process control” is one example of such a service, “continuous process control” is an example of a variant (sub service). Services and variants (sub services) require a set of parameters which needs to be described and named.
PV industry has specific needs on equipment integration
Established standards from SEMI and other organizations might not be directly applicable to PV.
One reason for this is the reduced complexity in PV manufacturing compared to regular semiconductor manufacturing. Using established SEMI Standards might result in high cost for integration as well as equipments itself due to the features provided by existing standards.
Only a subset of these standards does apply to PV manufacturing and would result in unwanted costs for the industry.
As a relatively new industry PV does not need to be backward compliant with older factories. This provides the industry with the opportunity to base on modern architecture and state of the art technologies. This can only be achieved by own standards for PV.
A review of existing standards from different industries and a adaption of best practices to PV will enable the industry to keep integration costs low.
Modularity will provide the possibility to build lightweight implementations as well as complex implementations to support all levels of shop floor automation.
This will help manufacturers to build factories using many levels of automation for thin film and silicon based factories.
The following objectives can be derived from the given arguments.
• Standardization on equipment interfaces for use with (service-oriented) shopfloor software systems based on the technical and financial requirements of PV industry
• Not to reinvent the wheel by (re-) using existing standards (SEMI, Non-semi, Company-Specifc)
• Provision of design patterns and usage guidelines for integration equipments into a distributed (service-oriented) IT-environment
• Identification of equipment services
• Feedback gained experience to "semiconductor" standards
b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information:
c. Estimate technical difficulty of the activity.
III: Difficult - Limited expertise and resources exist and/or achieving consensus difficult
Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The focus of the proposed task force is the definition of the interface between the equipment and other components of the manufacturing system for the photovoltaic industry in a way that it will fulfill the following requirements:
• appropriate for various types of PV processes and technologies
• appropriate for different levels of automation and automation concepts
• provide high level abstractions (based on manufacturing semantics, not on bits and bytes) in order to minimize integration efforts
• appropriate for modern SW technologies and paradigms
• The interface has to cover all areas of services of modern manufacturing control systems such as:
• Equipment monitoring
• WIP tracking
• Data collection
• Maintenance management
• Material identification
• Process and Job control
• open for easy integration in a variety of environments (platforms, programming languages)
• easily extendible for requirements not foreseeable today and for specific functions
• allow for reliable operation of the manufacturing environment
• allow tuning the trade-offs between performance and quality of service
• allow for similar layering for adapting a variety of proprietary communication protocols
• allow Plug and Play by using self description
The taskforce will define interfaces and services as well as sub services for the above described requirements. All Services as well as the parameters needed for the services have to be named and described in detail. For each service described before one ore more communication scenarios will be defined to visualize how the service will be called and interact with other services.
Bringing together expertise from a variety of PV equipment suppliers and users from wafering, cell and module manufacturing as well as thin film PV manufacturer, a comprehensive list of behavioral services and their sub services can be defined resulting in an invaluable repository for equipment modeling.
Design patterns and usage guidelines for embedding equipments into a distributed service-oriented environment should be given.
b: Expected result of activity
For a new Subordinate Standard, identify the Primary Standard here:
For Standards, identify the Standard Subtype below:
3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start:
b. 1st Draft by:
c. (Optional) Informational Ballot by:
d. Letter Ballot by:
e. TC Chapter Approval By:
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
PV committees in other regions
Affected (provisional) standards include but are not limited to:
SEMI E4 - SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 - SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 - Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 - Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E32 - Material Movement Management (MMM)
SEMI E37 - High-Speed SECS Message Services (HSMS) Generic Services
SEMI E38 - Cluster Tool Module Communications (CTMC)
SEMI E39 - Object Services Standard: Concepts, Behavior, and Services
SEMI E40 - Standard for Processing Management
SEMI E41 - Exception Management (EM) Standard
SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 - Event Reporting
SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS)
SEMI E79 - Specification for Definition and Measurement of Equipment Productivity
SEMI E81 - Provisional Specification for CIM Framework Domain Architecture
SEMI E87 - Specification for Carrier Management (CMS)
SEMI E90 - Specification for Substrate Tracking
SEMI E94 - Specification for Control Job Management
SEMI E99 - The Carrier ID Reader/Writer Functional Standard
SEMI E116 - Specification for Equipment Performance Tracking
SEMI E118 - Specification for Wafer ID Reader Communication Interface
SEMI E120 - Specification for the Common Equipment Model (CEM)
SEMI E121 - Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 - Specification for Equipment Self Description (EqSD)
SEMI E132 - Specification for Equipment Client Authentication and Authorization
SEMI E133 - Provisional Specification for Automated Process Control Systems Interface
SEMI E134 - Specification for Data Collection Management
SEMI E139 - Specification for Recipe and Parameter Management (RaP)
A list of comparable (provisional) standards and how the new standard complements or influences them or what changes are required needs to be elaborated.
Identify the recipient global technical committee(s):
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline
to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the
for special procedures to be followed.
NOT to be a Safety Guideline
": When all safety-related information is removed from the Document, the Document is still technically sound and complete.
6. Intellectual Property Considerations:
For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines
the use of patented technology or a copyrighted item(s) is NOT required
If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:
For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material
the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’
: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of
§ 16 must be followed.
will incorporate Copyrighted Item’
: A copyright release letter must be obtained from the copyright owner prior to publication.
7. Comments, Special Circumstances:
TC Member Review:
Member Review Start Date;
Member Review End Date:
‘TC Member Review’ is required by the
for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See
9. SNARF Approval Dates:
TC Chapter or GCS
Recorded in TC Minutes
10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
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