SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5090
SNARF for: Revision of SEMI M1-0311, Specifications for Polished Single Crystal Silicon Wafers

Originating Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International Polished Wafers Task Force

1. Rationale: The International 450 mm Wafer TF wants to incorporate specifications for polished 450 mm silicon wafers into SEMI M1. This document will provide this incorporation and in a second line item, upgrade certain non-controversial aspects of SEMI M1.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Tables covering 450 mm diameter silicon wafer specifications will be incorporated into SEMI M1 at various locations. All other related additions will be incorporated into SEMI M1. In addition, in a separate line item, certain additions and corrections to SEMI M1 will be proposed to allow for changes in referenced standards and other related technology improvements. It should be noted that the edge profile specs for 450 mm have not been fully developed. When this occurs, additional changes to Appendix 3 of SEMI M1 may be required. When this happens, an additional snarf will be prepared.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 11/01/2010b. 1st Draft by: 11/01/2010
c. Preballot by: d. Technical Ballot by: 01/01/2011
e. Committee Approval By:07/01/2011

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on November 9, 2010