SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/15/2010Revised (if Applicable):

Document Number: 5090
SNARF for: Revision of SEMI M1-0311, Specifications for Polished Single Crystal Silicon Wafers

Originating Global Technical Committee: Silicon Wafer
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: International Polished Wafers Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

___________________________________________________________________________
1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The International 450 mm Wafer TF wants to incorporate specifications for polished 450 mm silicon wafers into SEMI M1. This document will provide this incorporation and in a second line item, upgrade certain non-controversial aspects of SEMI M1.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

___________________________________________________________________________
2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Tables covering 450 mm diameter silicon wafer specifications will be incorporated into SEMI M1 at various locations. All other related additions will be incorporated into SEMI M1. In addition, in a separate line item, certain additions and corrections to SEMI M1 will be proposed to allow for changes in referenced standards and other related technology improvements. It should be noted that the edge profile specs for 450 mm have not been fully developed. When this occurs, additional changes to Appendix 3 of SEMI M1 may be required. When this happens, an additional snarf will be prepared.

b: Expected result of activity
Revision to an existing Standard/Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

___________________________________________________________________________
3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/01/2010b. 1st Draft by: 11/01/2010
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/01/2011
e. TC Chapter Approval By:07/01/2011

_____________________________________________________________________________
4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
This work will be coordinated and rely on input from the International 450 mm TF. Because all involved task forces are international, the work will be coordinated over all regions.
PIC Committee

b. Intercommittee Ballots:


Identify the recipient global technical committee(s):

___________________________________________________________________________
5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 14.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

___________________________________________________________________________
6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology or a copyrighted item(s) is NOT required

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material



NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 15 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

___________________________________________________________________________
7. Comments, Special Circumstances:
None.

__________________________________________________________________________
8. TC Member Review:
None.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
__________________________________________________________________________
9.. SNARF Approval Dates:
TC Chapter or GCS11/09/2010
Recorded in TC Minutes
Attach Pictures and Files here: