SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5105
SNARF for: New Standard: Guide for Cross Calibrating Particle Measurement Instruments for Liquid Chemicals

Originating Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Statistical Methods Task Force

1. Rationale: There are two SNARF’s being presented around issues involving particle counters that the task force wishes to address. This SNARF concerns the following. For a given sample commercial particle size analyzers differ, sometimes dramatically, on the measured values of the particle size distribution. Two instruments from the same vendor, the same model, in the same lab with the analysts can produce values that are significantly different. The goal is to develop a guide for using the results from one instrument to accurately predict the results from another instrument. This is called the cross calibration problem. This is important, for example when two instruments are used on finished goods, when one instrument is replaced by another and when the producer and user both measure the product to determine if it is in specification.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
III: Difficult - Limited expertise and resources exist and/or achieving consensus difficult

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
This activity will concern itself with the measurement of particle sizes in liquid chemicals produced for and used by the semi conductor industry. In particular the task force will focus on a method for cross calibrating between particle analyzers.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 11/01/2010b. 1st Draft by: 08/30/2011
c. Preballot by: d. Technical Ballot by: 08/30/2011
e. Committee Approval By:04/01/2012

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on November 9, 2010