SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4982
SNARF for: New Standard: Mechanical Interface Specification for 450mm FOSB Load Port

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: The International 450mm Shipping Box Task Force (450 ISB TF) responsible for the development of the 450mm FOSB standard has decided that the FOSB door closing force required is 390N and the clamping force associated with it is 190N per clamp feature both of which are excessive compared to the FOUP and MAC closing and clamping forces, such that the FOSB cannot be accommodated in the same load port standard and needs to have its own standard per the agreement in the IPIC TF.

Additionally the force requirements are specified in the carrier standards, thus to avoid confusion and reduce risk for load port standard, 450 IPIC TF has decided it is best to address the needs for the FOSB in a separate document.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Develop a Load Port standard that is built on the 450mm FOUP Load Port standard (E154) with the following items as the only requirement difference:
1. Door Closing Force which is specified in the 450mm FOSB ballot
2. Clamping force which is specified in the 450mm FOSB ballot

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 05/18/2010b. 1st Draft by: 05/18/2010
c. Preballot by: d. Technical Ballot by: 05/21/2010
e. Committee Approval By:07/16/2010

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: Intellectual Property Considerations:
Patent and/or patent applications material to this Standards draft document is unknown. Once the task force has determined that there is no alternative to the use of patented technology or copyrighted item(s), this SNARF will be revised then reapproved by the committee and the Global Coordinating Subcommittee (GCS).

Approval: Activity approved by Committee/GCS on May 20, 2010