SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/19/2017Revised (if Applicable): 04/10/2018

Document Number: 6332
SNARF for: New Standard: Specification for Panel Substrate Characteristics for Panel Level Packaging (PLP) Applications

Originating Global Technical Committee: 3D Packaging and Integration
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Fan-Out Panel Level Packaging (FO-PLP) Panel Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Panel Level Packaging (PLP) is under development and expected to become a critical 3D integration and packaging process. At the current time, numerous panel sizes are being investigated, which is delaying the introduction of the technology due to the need to customize tools and processes for each panel size.

In Fall 2017, SEMI surveyed members of the 3DP&I committee and a strong majority of the 65 respondents indicated the need for a standard size panel – or a small set of panel sizes – to accelerate the introduction of this technology.



b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Middle end of the line and substrate fabricators

c. Estimate technical difficulty of the activity.
III: Difficult - Limited expertise and resources exist and/or achieving consensus is difficult

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This document will specify at least one panel substrate size (and may list more if needed) for use in the PLP ecosystem. The document will also consider standardizing other parameters, for example ID marking, edge exclusion, as well as geometrical parameters such as total thickness variation (TTV), warp, etc.


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/07/2017b. 1st Draft by: 02/01/2018
c. (Optional) Informational Ballot by: d. Letter Ballot by: 02/21/2018
e. TC Chapter Approval By:11/06/2018

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Original SNARF prepared November 28, 2017, went out for two-week review; comments received and revised.

Rev1 SNARF sent out for another two-week review 12/20/17-01/03/18
-Approved vis GCS 01/11/2018

In 2018March TF Meeting, TF Members agreed to replace "Size" with "Characteristics" in the title: Specification for Panel Substrate Characteristics for Fan-Out Panel Level Packaging (FO-PLP) Applications
-this was approved at the NA Spring Meetings 2018

In 2018December TF Meeting, TF Members agreed to remove "Fan-Out...FO" from the title to be consistent with the FOUP TF and reballot with these changes thoughtout the document.

Ratification Ballot issued Cycle 4-2019: R6332A included a change to title. Removed "substrate"

Passed A&R Cycle 6-2019

Published as SEMI 3D20-0719


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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 12/20/2017
Member Review End Date: 01/03/2018

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS01/11/2018
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on
SNARF_Spec for Panel Substrate Charac Rev1.docSNARF_Spec for Panel Substrate Charac Rev1.docSNARF_Spec for Panel Substrate Charac Rev1_dist.pdfSNARF_Spec for Panel Substrate Charac Rev1_dist.pdfSNARF_Spec for Panel Size Rev2.docSNARF_Spec for Panel Size Rev2.doc