SEMI International Standards
SEMI New Activity Report Form (SNARF)



Activity Number: 5464
SNARF for: Revision to SEMI E154-0612, Mechanical Interface Specification for 450 mm Load Port


Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Global PIC Maintenance Task Force


1. Rationale: MAC (E159) is the same specifications with respect to interoperability interfaces with 450 FOUP (E158). Therefore, we want to add the MAC term in the documentation of FOUP-LP (E154).

Revised Rationale (11/12/12):
MAC (E159) is the same specifications with respect to interoperability interfaces with 450 FOUP (E158). Therefore, we want to add the MAC term in the documentation of FOUP-LP (E154). Key definitions for the 450 mm standards are not aligned with one another. Need to align this standard with the other 450mm standards.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Add the description of the Mechanical Specification for Multi Application Carrier (MAC) into sections 1 through 4. This scope is limited to inclusion of MAC to the document only and no other technical changes.

Revised Scope (11/12/12):
The following changes are to be balloted as a single Letter Ballot:
Add the description of the MAC into sections 1-5.
Add the acronym KCP and use it in the definitions for BP, FP and HP
Correct the Referenced Standards: 1) delete E15.1, E62 and Note 1; add E110 ; 2) add a Referenced Standards section to RI-1; reference E15.1, E62 and E63.
Revise the KC Pins requirement as follows:
7.16 KC Pins — A load port must have a set of three primary coupling pinsKCPs as specified defined in the 450 mm carrier DocumentSEMI E158. A load port must be designed such that there will be no interference between any part of the load port and a carrier 450 FOUP delivered within the lead-in range of r15 specified in the 450 mm carrier DocumentSEMI E158.


b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/25/2011b. 1st Draft by: 06/10/2012
c. Preballot by: d. Technical Ballot by: 01/14/2013
e. Committee Approval By:04/03/2013




Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline


Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, there is no alternative to the use of patented technology or copyrighted item(s)
b. The body of the standard and any appendices or related information sections will include copyrighted material

Comments, Special Circumstances: Shoji received the Letter of Assurance from Entegris and Crossing Automation.

Approval: Activity approved by Committee/GCS on July 11, 2012