SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 06/10/2012Revised (if Applicable): 11/12/2012

Document Number: 5464
SNARF for: Revision to SEMI E154-0612, Mechanical Interface Specification for 450 mm Load Port

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Global PIC Maintenance Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
MAC (E159) is the same specifications with respect to interoperability interfaces with 450 FOUP (E158). Therefore, we want to add the MAC term in the documentation of FOUP-LP (E154).

Revised Rationale (11/12/12):
MAC (E159) is the same specifications with respect to interoperability interfaces with 450 FOUP (E158). Therefore, we want to add the MAC term in the documentation of FOUP-LP (E154). Key definitions for the 450 mm standards are not aligned with one another. Need to align this standard with the other 450mm standards.

b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Add the description of the Mechanical Specification for Multi Application Carrier (MAC) into sections 1 through 4. This scope is limited to inclusion of MAC to the document only and no other technical changes.

Revised Scope (11/12/12):
The following changes are to be balloted as a single Letter Ballot:
Add the description of the MAC into sections 1-5.
Add the acronym KCP and use it in the definitions for BP, FP and HP
Correct the Referenced Standards: 1) delete E15.1, E62 and Note 1; add E110 ; 2) add a Referenced Standards section to RI-1; reference E15.1, E62 and E63.
Revise the KC Pins requirement as follows:
7.16 KC Pins — A load port must have a set of three primary coupling pinsKCPs as specified defined in the 450 mm carrier DocumentSEMI E158. A load port must be designed such that there will be no interference between any part of the load port and a carrier 450 FOUP delivered within the lead-in range of r15 specified in the 450 mm carrier DocumentSEMI E158.

b: Expected result of activity
Revision to an existing Standard/Guideline

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 10/25/2011b. 1st Draft by: 06/10/2012
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/14/2013
e. TC Chapter Approval By:04/03/2013

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)

b. Intercommittee Ballots:

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
there is no alternative to the use of patented technology or copyrighted item(s)

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will include copyrighted material

NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 16 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

7. Comments, Special Circumstances:
Shoji received the Letter of Assurance from Entegris and Crossing Automation.

8. TC Member Review:

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
9.. SNARF Approval Dates:
TC Chapter or GCS07/11/2012
Recorded in TC Minutes
Attach Pictures and Files here: