TFOF - MEMS Microfluidics

SEMI International Standards
Task Force Organization Form (TFOF)

Task Force Name: MEMS Microfluidics

Global Technical Committee: MEMS / NEMS
Originating Technical Committee Region: North America

1. Charter:

Develop guidelines for generic fluidic I/O design and fabrication that can reduce redundant engineering effort and lead to increased manufacturability, testing and operation. This should include standards for performance, practices, and assembly of microscale fluidic components.

2. Scope:
This document will provide guidance to users involved in design and development of standard fluidic interfaces. The output of this activity will be a SEMI MEMS Standard that can help accelerate fluidic MEMS commercialization.

Task force members will meet 1-2 hrs per month (teleconference) to develop the guide. Experience of Task Force members will drive the scope and detail of the guide.

Proposed Document Title: Guide for Standard Performance, Practices, and Assembly for Ultra High Purity Microscale Fluidic Systems for use in Scalable Process Environments

3. Formal linkages with Task Forces in other Regions:
European MEMS Committee

4. Approval:
Task Force formed on: 10/15/2003