SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 08/06/2023Revised (if Applicable):

Document Number: 7167
SNARF for: New Standard: Test Method for Measuring and Characterizing Surface Particle Contamination on Critical Chamber Components with Airborne Particle Counter and Dry Aerosolizing Chamber

Originating Global Technical Committee: Metrics
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Critical Chamber Components (CCC) Test Methods Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Particle contamination on critical chamber components of process modules comprising production equipment for manufacturing and inspection tools can have significant negative effects in production yield, reliability and devices’ lifetime.

Understanding particulate contaminants is an important step in controlling operating environments for reducing particle deposition in critical components. Isolating, characterizing and understanding the types of particles found in products or processes is key for identifying contamination sources.
Dry surface contamination aerosolizing chambers offer a non-destructive and non-contact alternative for removing particulate contaminants from surfaces and characterizing the contaminants with a variety of analytical equipment available on the market.

Air jets are utilized for aerosolizing particulate contaminants from surfaces, which allows critical components to be exposed to clean dry air. Minimal sample preparation time is required, and when the test chamber is paired with an airborne particle counter the results also include a profile of particulate contaminant release timing.

The main advantages of the said test methods are:
· No contact to the specimen
· Non-destructive and non-contaminant. Specimen may be utilized right after testing.
· Low detection limit down to 10nm
· Allows for testing of items (finished assemblies, graphite parts, porous coatings) that cannot be tested with other established methods such as LPC
· Allows for dry collection of particulate contaminants for offline analysis
· No sample preparation required and relatively short overall testing time

Non-destructive dry chamber particle monitoring is currently utilized by the industry, but techniques, technologies and methodologies are currently not covered by any SEMI Standard. Thus, a test method is proposed to measure particle contamination in a non-destructive manner, that does not require physical contact with the sample, and can detect particle sizes from 10 nm to 10µm.

Other methods covered by current standards provide different complementary information – each with its own limitations, which makes the dry-chamber method a valuable inclusion to established testing methodologies.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Semiconductor device manufacturing

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This document applies to measurements of particles on coupons, finished assemblies and critical chamber components by non-destructive testing with airborne particle Counter in a controlled chamber.

Chambers utilizing the same physical mechanisms to aerosolized surface particles and portable sampling probes are also included in this document for related items that include, but are not limited to, showerheads, pedestals, weldments, optical housings, cassette and Cleanroom consumables.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2023b. 1st Draft by: 07/01/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 01/01/2024
e. TC Chapter Approval By:02/01/2024

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 10/17/2023
Member Review End Date: 10/31/2023

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/09/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on