TFOF for F1 Revision TF
SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
09/07/2000
Revised (if Applicable):
Name of Task Force (TF):
F1 Revision TF
Global Technical Committee:
Facilities
Originating Technical Committee Region:
Japan
_____________________________________________________________________________
1. Charter:
(State the objective of the proposed TF.)
New task force will revise SEMI F1-96.
_____________________________________________________________________________
2. Scope:
(Define the specific activities that the TF will conduct.)
This task force will reexamine and revise the leak specification for gas supply systems, sub-systems, and components.
_____________________________________________________________________________
3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
_____________________________________________________________________________
4. Formation Date:
(TF formed on)
Task Force formed on:
09/07/2000
Task Force approved by Committee/GCS on:
5. Comments
None.