SEMI International Standards
Task Force Organization Form (TFOF)

Task Force Name: International Polished Wafers Task Force

Global Technical Committee: Silicon Wafer
Originating Technical Committee Region: International

1. Charter:

Maintain SEMI M1, Specifications for Polished Monocrystalline Silicon Wafers, including Parts 1 and 2 of the Silicon Wafer Specification Format for Order Entry, which is included in that specification.

2. Scope:
Monitor and maintain specifications for polished monocrystalline silicon wafers, including substrates for epitaxial and SOI wafers and starting wafers that result in further processing, such as annealed wafers. Develop and maintain specifications for basic wafer specifications as needed, and adding entries, including test methodology, to Part 2 of the Silicon Wafer Specification Format for Order Entry as required by evolving technologies for polished and other types of silicon wafers.

3. Formal linkages with Task Forces in other Regions:
The intention is to make this task force international with co-leaders in each interested region. Close liaison with the M18 revision and Terminology task forces in all regions is essential.

4. Approval:
Task Force formed on: 03/01/2005