SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4770
SNARF for: 450mm Horizontal Multi Application Carrier Standard (450 H-MAC)

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: NA 450mm Shipping Box Task Force

1. Rationale: There is a need by multiple end users in the Semiconductor industry for a carrier which can address various applications that already exist in the industry for 300mm wafer manufacturing and wafer shipping. To full fill this need the carrier shall enable factory integration compatibility with 450 FOUP thus minimizing impact to Tools, Load Port & EFEM, AMHS and manufacturing environment/facilities and yet efficient.
Rate the Estimated Effect on the Industry
1: Major effect on entire industry or on multiple important industry sectors

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Leverage 4570A FOUP standard document as the frame work. 450 H-MAC shall have the same envelope, factory integration and interoperability interfaces as the 450 FOUP while delivering the needs of the multiple applications. 450 H-MAC is an E-series NA PIC Standard.

Note: H-MAC is a perimeter wafer support carrier and enables random access in the same envelope as the FOUP

The H-MAC is focused on Silicon Manufacturing and Processed Wafer Shipping.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/26/2009b. 1st Draft by: 07/06/2009
c. Preballot by: 07/17/2009d. Technical Ballot by: 10/05/2009
e. Committee Approval By:04/01/2010

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed,
b. The body of the standard and any appendices or related information sections

Comments, Special Circumstances: Intellectual Property Considerations:
Patent and/or patent applications material to this Standards draft document is unknown. Once the task force has determined that there is no alternative to the use of patented technology or copyrighted item(s), this SNARF will be revised then reapproved by the committee and the Global Coordinating Subcommittee (GCS).

Approval: Activity approved by Committee/GCS on July 16, 2009