SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/12/2011Revised (if Applicable):

Document Number: 5263
SNARF for: Revisions to SEMI E158-1110, Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450mm Wafers (450 FOUP) and Kinematic Coupling, and SEMI E159-0611, Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450mm Wafers

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: International 450 mm Physical Interfaces & Carriers
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Text and Table corrections presented within.
Corresponding Figure corrections are either listed next to the table item or separately in slides for later correction.
Align both documents (E158 and E159)
Correct the frame pin hole interference

b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Line item 1. Change and add the “end effector” term in the Terminology section for E159(MAC).

Line item 2. Add explanation of the Center of Gravity Volume for E159(MAC).

Line item 3. Unify section.6 and table 1 with the term of the FOUP standard for E159(MAC)

Line item 4. Correction of some terms to facilitate understanding for E158(FOUP) and E159(MAC).
- Section 8.1.4, section 9.1, section 14.4 of FOUP, section 14.4 of MAC, section 17.6.3 of FOUP, section 17.7.3 of MAC and section R3-1.1.

Line item 5. Change the shape of frame pin hole for E158(FOUP) and E159(MAC).

b: Expected result of activity

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/12/2011b. 1st Draft by: 08/29/2011
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/29/2011
e. TC Chapter Approval By:10/26/2011

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
450 ISB TF

b. Intercommittee Ballots:

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 16 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

7. Comments, Special Circumstances:
Existing IP considerations in E158 and E159

8. TC Member Review:

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
9.. SNARF Approval Dates:
TC Chapter or GCS07/13/2011
Recorded in TC Minutes07/13/2011
Attach Pictures and Files here: