SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/22/2009Revised (if Applicable): 09/21/2011

Document Number: 4771
SNARF for: New Standard: Particle Removal Test Method for Equipment Fan Filter Unit (EFFU)

Originating Global Technical Committee: Facilities
Originating TC Chapter: Korea
Task Force (TF) in which work is to be carried out: Equipment Cleanness Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Clean Technology is critical to the semiconductor production line. If a semiconductor production line does not operate in ultra clean levels, foreign particles introduced during the process may prevent production of semiconductor device to exact specifications. Therefore, Clean Technology is critical to the production line.

Most manufacturers of EFFUs would like to reduce the cost of having several EFFU developments as well as cost of respective mass production equipment fitted to each EFFU by setting up a standard for both EFFU and mass production equipment. Thus, standardization of EFFUs is very necessary for achieving low cost and high energy efficiency.

Therefore, there is a need to develop a test method and specification that will be generally reliable and acceptable in order to standardize EFFUs and spread out standard guidelines of EFFUs.

b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This standard intends to provide a test method for EFFUs. It focuses on its particle removal characteristic. The standard which is about test procedure for EFFUs characterization includes following item:

1. Test method of particle removal performance
Place the test EFFU filled with test particles in a chamber while a discrete particle counter (DPC) is monitoring the particle concentration, not in the chamber.
Start the EEFU and monitor the particle concentration with DPC until the particle concentration, N, reaches 0.01*No.
Find the best fit line from the concentration change graph. The slope of the best fit line is the particle removal characteristic of EFFU.

The objective of this standard is to provide a method for performance testing and reporting based upon consistent procedures. This can then be referenced by and integrated into a relevant industry recommended for field practice or suggestions of standard.

b: Expected result of activity
New Standard

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 03/03/2009b. 1st Draft by: 10/17/2011
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/17/2011
e. TC Chapter Approval By:07/30/2012

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
Japan Gases& Facilities committee, NA Facilities committee

b. Intercommittee Ballots:

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology or a copyrighted item(s) is NOT required

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include copyrighted material

NOTE FOR "the use of patented technology or a copyrighted item(s) is NOT required": If in the course of developing the document, it is determined that patented technology or copyrighted item(s) must be used to comply with the standard or safety guideline, the provisions of Section 16 of the Regulations must be followed.)

NOTE FOR "will include reproduced copyrighted material": A copyright release letter must be obtained from the copyright owner.

7. Comments, Special Circumstances:
1. The SNARF was approved by NA Facilities on July 22, 2009 and it is transferred to Korea Facilities and approved on October 21, 2010
2. The transferred SNARF is also revised its scope on September 21, 2011.
3. The title of the SNARF has been changes from "New Standard: Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal " to "New Standard; Particle Removal Test Method for Equipment Fan Filter Unit (EFFU)" on June 20, 2012

8. TC Member Review:

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)
9.. SNARF Approval Dates:
TC Chapter or GCS09/21/2011
Recorded in TC Minutes09/21/2011
Attach Pictures and Files here: