SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5205
SNARF for: Revision to SEMI E154-1110, Mechanical Interface Specification for 450 mm Load Port

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: In 300mm, there are a lot of Indicator combinations because Indicator’s color and meaning of each color, size, number or layout is not standardized. .
Such variation of Hardware impacts on Load port operation software development and maintenance loads and lead time.
In order to facilitate rapid and cost effective transition for 450mm tool, a common specification with reduced variation for Load port Indicator is needed.

Proposed revision will not cover the Manual switch placement zone or switch itself. This direction is based on a belief that Indicator set hardware specification should be standardized with consideration of Auto/Manual mode software in 450mm.
Because 450mm is Auto mode keynote as ISMI 450mm/NGF “19 Points” Guideline #4 says “MHS Design to assume infrequent, anomaly manual handling only”.

Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:

Color, meaning of each color, number and layout for recommended set of Indicators
Indicator Placement zone
Indicator size

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 04/08/2011b. 1st Draft by: 09/01/2011
c. Preballot by: d. Technical Ballot by: 10/04/2011
e. Committee Approval By:12/09/2011

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: ISMI suggested this topic to be discussed in International 450mm Physical Interface & Carriers TF.

Approval: Activity approved by Committee/GCS on April 8, 2011