Activity Number: 5205
SNARF for: Revision to SEMI E154-1110, Mechanical Interface Specification for 450 mm Load Port
SEMI International Standards
SEMI New Activity Report Form (SNARF)
1. Rationale: In 300mm, there are a lot of Indicator combinations because Indicator’s color and meaning of each color, size, number or layout is not standardized. .
|Originating Global Technical Committee: Physical Interfaces & Carriers|
|Originating Technical Committee Region: Japan|
|Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers|
Such variation of Hardware impacts on Load port operation software development and maintenance loads and lead time.
In order to facilitate rapid and cost effective transition for 450mm tool, a common specification with reduced variation for Load port Indicator is needed.
Proposed revision will not cover the Manual switch placement zone or switch itself. This direction is based on a belief that Indicator set hardware specification should be standardized with consideration of Auto/Manual mode software in 450mm.
Because 450mm is Auto mode keynote as ISMI 450mm/NGF “19 Points” Guideline #4 says “MHS Design to assume infrequent, anomaly manual handling only”.
Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector
Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible
a: Define the areas to be covered or addressed by this activity or document:
Color, meaning of each color, number and layout for recommended set of Indicators
Indicator Placement zone
b: Expected result of activity
Revision to an existing Standard/Guideline
3. Projected Timetable for Completion:
|a: General Milestones|
|a. Activity Start: 04/08/2011||b. 1st Draft by: 09/01/2011|
|c. Preballot by: ||d. Technical Ballot by: 10/04/2011|
|e. Committee Approval By:12/09/2011|
The resulting document is expected NOT to be a Safety Guideline
Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material
Comments, Special Circumstances: ISMI suggested this topic to be discussed in International 450mm Physical Interface & Carriers TF.
Approval: Activity approved by Committee/GCS on April 8, 2011
Copyright ©2014 Semiconductor Equipment and Materials International (SEMI®). All rights reserved.