SEMI International Standards
Task Force Organization Form (TFOF)


Task Force Name: International Process Module Physical Interface TF (IPPI-TF)


Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: International


1. Charter:

The TF is formed to discuss standardization of physical interface and other interoperability related specification for the 450mm (vacuum) process modules and transfer module of the cluster tool.

2. Scope:
The TF will assess the industry needs and necessary extent for standardization of physical interface and other interoperability related specification for the 450mm (vacuum) process modules and transfer module of the cluster tool.
For the area that are agreed upon a need for standardization, the TF is expected to develop Standards that define physical interface and other interoperability related specification between the process chamber and the different modules (e.g. transfer module) of a cluster tool, which may be 450mm equivalent of or similar to E21.1 and E22.1 (So-called 300mm MESC Standards).


3. Formal linkages with Task Forces in other Regions:
The TF will be Global TF.
Formal linkages with all the regional PIC committee are expected.
450mm IPIC-TF


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4. Approval:
Task Force formed on: 07/13/2011