SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Revised (if Applicable):
Name of Task Force (TF):
International Process Module Physical Interface TF (IPPI-TF)
Global Technical Committee:
Physical Interfaces & Carriers
Originating Technical Committee Region:
(State the objective of the proposed TF.)
The TF is formed to discuss standardization of physical interface and other interoperability related specification for the 450mm (vacuum) process modules and transfer module of the cluster tool.
(Define the specific activities that the TF will conduct.)
The TF will assess the industry needs and necessary extent for standardization of physical interface and other interoperability related specification for the 450mm (vacuum) process modules and transfer module of the cluster tool.
For the area that are agreed upon a need for standardization, the TF is expected to develop Standards that define physical interface and other interoperability related specification between the process chamber and the different modules (e.g. transfer module) of a cluster tool, which may be 450mm equivalent of or similar to E21.1 and E22.1 (So-called 300mm MESC Standards).
3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
The TF will be Global TF.
Formal linkages with all the regional PIC committee are expected.
4. Formation Date:
(TF formed on)
Task Force formed on:
Task Force approved by Committee/GCS on: