SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5049
SNARF for: Revision to SEMI E35-0307, Guide to Calculate Cost Of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

Originating Global Technical Committee: Metrics
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Equipment Cost of Ownership TF

1. Rationale: SEMI E35-0307 needs to be updated to correct a known terminology problem (i.e., “consumable” to “consumable part”). It may also need other updates to remain consistent with the mandatory 5-year review and revision planned for SEMI 140-0305.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
The entire SEMI E35-0307 needs to be reviewed and updated as needed, especially to be compliant with the planned E140 revision, the referenced SEMI E10, and other relevant standards that may have been published since this revision. One example revision known is to correct the term “consumable” to “consumable part”. Potential changes to improve usage of E35 by all SEMI-related users (e.g., MEMS/NEMS, PV, FPD) will be considered. Any changes necessary to bring E35 into compliance with the SEMI Standards Style Manual will also be included.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 07/13/2010b. 1st Draft by: 10/01/2010
c. Preballot by: d. Technical Ballot by: 03/01/2010
e. Committee Approval By:03/01/2011

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on July 14, 2010