SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 11/05/2019

Revised (if Applicable):

Name of Task Force (TF): Water Management Task Force

Global Technical Committee: Liquid Chemicals

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
The goal of this task force is to develop and update documents directly pertaining to water conservation to provide guides for design and operation of the affected systems and hardware to enable timely and cost-effective decisions
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2. Scope: (Define the specific activities that the TF will conduct.)
The scope of the task force is to update the existing SEMI F98 guide for overall facilities water reuse and to develop a new guide(s) focusing on the manufacturing tools capabilities that would support the needs and sustainability of the growing Semiconductor manufacturing sites.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
none
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4. Formation Date:(TF formed on)

Task Force formed on: 11/05/2019
Task Force approved by Committee/GCS on:

5. Comments
None.