SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4556
SNARF for: New Standard:Method For The Determination Of Surface Areas Of Polymer Pellets

Originating Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: Method for the Determination of Surface Areas of Polymer Pellets Task Force

1. Rationale: Knowing the surface area of small objects, such as polymer pellets used in the injection molding or extrusion of high purity polymer components, is important when calculating surface contamination values required in SEMI F57 and then later relating them to any contamination found in the finished component.

The surface area of a given manufactured component is easy to obtain. However, the surface area of a polymer pellet is somewhat difficult since it does not adhere to strict Euclidian principles (spheres, cylinders, etc . . .).

Without knowing relatively accurate surface areas it becomes difficult to investigate the source of any contamination. That is to say, is it from the raw material or the component manufacturing process?

Such a tool for determining surface area in these objects would give all parties within the component manufacturing chain the ability to troubleshoot the source(s).

Additionally, the taskforce believes that such a method could be useful in other industries related to microelectronics.

Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
A taskforce would investigate three different methods for determining the surface area, define the procedure and document the limitations of each.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 01/01/2008b. 1st Draft by: 06/01/2008
c. Preballot by: d. Technical Ballot by: 10/01/2008
e. Committee Approval By:01/01/2009

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on January 10, 2008