SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 4980
SNARF for: Revision to SEMI E154-0310, Mechanical Interface Specification for 450mm Load Port

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: The 450mm Load Port standard was published by SEMI as E154 in February 2010 for 450 FOUP, but it did not comprehend the Shipping Box Carrier due to carrier design not being ready/finalized. Now the 450 NA Shipping Box TF has closed the design for the 450mm Multi Application Carrier (MAC) and the 450 International Shipping Box TF has close on the architecture design and is in the process of closing the remaining design parameters, the TF needs to get the load port document updated. Both 450 MAC and 450 FOSB will have a yellow ballot for Cycle 4, 2010.

So we need to update the Load Port standard to comprehend the MAC and FOSB standard based on agreement between the TFs. These changes will be balloted as a line item(s). This ballot needs to be submitted for Cycle 4, 2010 as well.

Load Port Yellow Ballot submission was approved the NA PIC Committee in the March 2010 SEMI Spring Meeting.

Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
1. Comprehend 450 MAC and 450 FOSB maximum door thickness y58< 52.25mm dimension related changes in the 450 Load Port Standard (E154)

2. Comprehend 450 MAC door closing force related changes in the 450 Load Port Standard (E154)

3. Comprehend 450 FOSB door closing force related changes in the 450 Load Port Standard (E154)
a. Note: If the FOSB closing force related changes cannot be accommodated/comprehended, TF should propose an approach to the NA PIC/GCS Committee on how to proceed, e.g. separate load port document(s) ASAP – i.e. no later than one week (five business days) prior to May 17th Cycle 4 deadline.

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 04/15/2010b. 1st Draft by: 05/15/2010
c. Preballot by: d. Technical Ballot by: 05/15/2010
e. Committee Approval By:07/16/2010

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: Intellectual Property Considerations:
Patent and/or patent applications material to this Standards draft document is unknown. Once the task force has determined that there is no alternative to the use of patented technology or copyrighted item(s), this SNARF will be revised then reapproved by the committee and the Global Coordinating Subcommittee (GCS).

Approval: Activity approved by Committee/GCS on May 17, 2010